Tutorial: Dynamics, characterization and control at the micro/nano scale 
Friday May 13, 2011


This tutorial aims to provide courses and lectures on dynamics, characterization and control techniques used at the micro/nano scale level. The considered applications are the micro/nanopositioning, micro/nanorobots and imaging/measuring with nanometer accuracy (AFM, SEM). At the micro/nano scale, the systems should perform a high positioning resolution (micro/nanometers) and often a high bandwidth (some kHz). However, we know that these systems will be very sensitive to environmental disturbances (temperature, vibrations, etc.) and to usury due to functioning. The minute displacements in these systems lead to very low signal-to-noise ratio in the position measurements. Furthermore, the materials usually employed for these systems exhibit strong nonlinearities and time-varying parameters. Finally, the lack of embeddable and convenient sizes/costs sensors with the required performances for micro/nano scale makes hard the improvement of their performances. Thus It is primordial to understand and characterize the behaviour dynamics at the micro/nano scale and to employ convenient control laws to account the above characteristics, and to reach the required performances for the different applications.

The presenters of this tutorial will provide self-contained notes on the recent modelling, characterization and innovative modelling and control techniques that can be efficiently used to address these challenges characterizing the micro/nano scale. The tutorial is a full day tutorial.

Motivation and objectives

Applications at the micro/nano scale (micro/nanopositioning, imaging and surface scanning in AFM and SEM, …) are characterized by the need of very high resolution (micro or nanometers) and fast dynamics (more than the kHz) over displacements of some tens of microns. Because of the small sizes of the systems and of the signals, environmental conditions (such as temperature, humidity, vibration) could generate noise and disturbance that are in the same range as the displacements of interest. Furthermore, smart materials (piezoceramics, magnetostrictive, shape memory, electro-active polymer,…) - that are mainly used for actuation or sensing in the micro/nano-scale for their high resolution – exhibit strong nonlinearities such as hysteresis, creep, nonlinear vibration and drifts and then performances are considerably lost. Finally, there is an evident lack of high performances sensors that can be easily integrated for the identification and control in micro/nano scale.

To address these issues, several approaches have been used and innovative modelling, characterization, measurement and control techniques were developed and are being applied, such as infinite dimension tools, self-sensing, vision based, robust control, feedforward…

The objectives of this tutorial is to allow specialists give lectures, courses and overview - from basics to recent advances, with examples of applications - of the different approaches of design/development, modelling and control of systems for the micro/nano scale. The tutorial is intended for Senior researchers, PhD students, Post- Doc and engineers working in the micro/nano world in general, especially on the modelling, measurement, control and automation aspects.

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