2010 IEEE International Conference on Robotics and Automation
Anchorage, Alaska, May 3-8, 2010
WorkShop:
"Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World"
2010 IEEE International Conference on Robotics and Automation
Anchorage, Alaska, May 3-8, 2010
WorkShop:
"Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World"
The main objectives of this workshop is to provide an overview of the recent measurement systems and signal estimation techniques performed for robots dedicated to act in the micro/nano world. The information concerned in this workshop is mainly force and position. At these scales, force and position signal are commonly of very small amplitude and exhibit a small signal/noise ratio. Nevertheless, the integration of sensors with suitable performances (high bandwidth, very high accuracy and convenient size, integration ability) remains highly challenging. In fact, it appears that the lack of such sensors is the main limitation to successfully perform the control of robots in the micro/nano world and to push back the limits of automation, as for example required in rapid and precise microassembly. These last years, the technological obstacles have led researchers to the design of a new generation of integrated sensors (Silicon/PZT, etc.), self-sensing methods in active materials and advanced signal estimation coming from control theory.
The need of high performances micro/nano robots and microrobotic cells increases rapidly. These new technologies can be used for applications such as micromanipulation (artificial components, biological objects), micro-assembly (MEMS, MOEMS, NEMS), material and surface force characterization. At the micro/nano scales, sensing is a key issue to control systems and to understand physical phenomena. Numerous sensors with suitable resolution and range are necessarily required.
Positioning accuracy and resolution have to be in the submicrometer range while those concerning force are in the micro-nano Newton range. Moreover, some applications require high dynamic performances and then high bandwidth sensors, for instance the automation of piezoelectric based micromanipulation robots. On the one hand, sensors that guarantee these performances are bulky and expensive (interferometers, scanning electron microscopes, cameras, laser sensors). Furthermore, most of these sensors generally enable only one or 2D measurements. On the other hand, sensors that are compact and convenient for packaging (strain gage, piezoceramic sensor, etc.) are very fragile and have very limited performance and robustness.
Positioning accuracy and resolution have to be in the submicrometer range while those concerning force are in the micro-nano Newton range. Moreover, some applications require high dynamic performances and then high bandwidth sensors, for instance the automation of piezoelectric based micromanipulation robots. On the one hand, sensors that guarantee these performances are bulky and expensive (interferometers, scanning electron microscopes, cameras, laser sensors). Furthermore, most of these sensors generally enable only one or 2D measurements. On the other hand, sensors that are compact and convenient for packaging (strain gage, piezoceramic sensor, etc.) are very fragile and have very limited performance and robustness.
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