2010 IEEE International Conference on Robotics and Automation
Anchorage, Alaska, May 3-8, 2010
"Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World"
- S. Muntwyler , F. Beyeler and B.J. Nelson,
Institute of Robotics and Inteligent Systems (IRIS),
ETH Zurich, Zurich, CH 8092, SWITZERLAND.
Microrobotic tools for the measurement of small forces
Capacitive force and position sensing in combination with electrostatic actuation is used to design miniature tools capable of measuring forces between nano- and micronewtons to mechanically characterize microscopic samples. The functional principle of the tools as well as an introduction into the fabrication and capacitive readout are given. The calibration, being one of the most challenging parts of microforce sensing, as well as the methods to calculate the sensing uncertainty are presented.
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